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发明名称
LOW PRESSURE CVD SYSTEM
摘要
申请公布号
JPH10195657(A)
申请公布日期
1998.07.28
申请号
JP19960357809
申请日期
1996.12.27
申请人
ASAHI GLASS CO LTD
发明人
NISHIHAMA JIRO
分类号
C23C16/44;H01L21/205;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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