发明名称 |
Vacuum compatible linear motion device |
摘要 |
A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.
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申请公布号 |
US5784925(A) |
申请公布日期 |
1998.07.28 |
申请号 |
US19960766271 |
申请日期 |
1996.12.13 |
申请人 |
ETEC SYSTEMS, INC. |
发明人 |
TROST, DAVID;VENEKLASEN, LEE |
分类号 |
F16C29/00;F16C29/02;F16C32/06;G03F7/20;H01J37/20;H01J37/305;H01L21/027;(IPC1-7):G05G11/00;F16C33/06;F16J15/52 |
主分类号 |
F16C29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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