CRYSTAL HOLDER

摘要

In one embodiment, the present invention provides a crystal holder that includes a crystal, a housing body, a housing cap, a first O-ring and a second O-ring. The first O-ring is disposed between the crystal and the housing cap, and the second O-ring is disposed between the crystal and the housing body. The crystal holder may be included within a vacuum system having a deposition chamber. In another embodiment, the present invention provides a crystal holder that includes a crystal, a housing body and a tubing. The housing body is adjacent the crystal such that a volume is formed between the rear face of the crystal and the housing body. The tubing has a first open end and a second open end, and the tubing is partially disposed within the orifice of the housing body such that the first open end is disposed within the volume between the rear face of the crystal and the housing body. This crystal holder may be incorporated into a vacuum system having a deposition chamber.