发明名称 |
Semiconductor sensor including laminated supporting pedestal |
摘要 |
A semiconductor sensor includes a circuit board; a pedestal including stacked board-composing materials arranged sequentially on the circuit board and describing a mesh shape on the circuit board, the mesh shape including at least one central opening in which the circuit board is exposed; and a sensing element fixed to and supported on the pedestal as a cantilever.
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申请公布号 |
US5783750(A) |
申请公布日期 |
1998.07.21 |
申请号 |
US19960731130 |
申请日期 |
1996.10.10 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
OTANI, HIROSHI |
分类号 |
G01L9/00;G01P1/02;G01P15/08;(IPC1-7):G01L9/06 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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