| 摘要 |
PROBLEM TO BE SOLVED: To prevent damages on a wafer at the time of shifting the wafer by obviating visual confirmation by an operator and automatically detecting the direction of a carrier correctly on a base plate. SOLUTION: An operator need not decide the direction of a carrier 3 by visual confirmation as seen in conventional devices by detection by a carrier detector 44 of the direction of the carrier 3 with discriminating sections having different shapes in a front and a rear and information through a control section 43 as to whether or not the carrier 3 is directed in the fixed direction in response to a detection output from the carrier detector 44, and the direction of the placing of the carrier to a first table 22 can be detected automatically and correctly. Accordingly, since the direction of the carrier 3 is made accurate at all times, damages on a wafer at the time of shifting the wafer as seen in conventional devices is prevented. |
