| 摘要 |
PURPOSE: To improve the yield of disk production by vacuum attracting a pair of single-sided disks respectively to the vacuum attraction surfaces of attraction tables and correcting the warp and twists of the respective disk surfaces. CONSTITUTION: The single-sided disk A attracted to the lower attraction table 17 is corrected to a completely flat state and is attracted to the table by the pressure difference generated when compressed air of about 2kg/cm<2> is fed from the gas passage 14 of a disk attraction section 9. In such a case, the vacuum attraction surface 31 of the upper attraction table 18 faces downward and, therefore, the disk attraction section 9 of an attraction arm 8 is vertically inverted by a vertical inversion mechanism (not shown in Fig.) so as to be turned upside down. The operation similar to the case shown in Fig. is then carried out. |
