In-line real time air monitor

摘要

An in-line gas monitor capable of accurate gas composition analysis in a continuous real time manner even under strong applied vacuum conditions operates by mixing an air sample with helium forming a sample gas in two complementary sample loops embedded in a manifold which includes two pairs of 3-way solenoid valves. The sample gas is then analyzed in an ion trap mass spectrometer on a continuous basis. Two valve drivers actuate the two pairs of 3-way valves in a reciprocating fashion, so that there is always flow through the in-line gas monitor via one or the other of the sample loops. The duty cycle for the two pairs of 3-way valves is varied by tuning the two valve drivers to a duty cycle typically between 0.2 to 0.7 seconds.