发明名称 |
Apparatus for laser exposure of a substrate disk and a method for the centered mounting of a substrate disk |
摘要 |
A vertically disposed drive spindle (5) rotates turntable (6) supporting a substrate (7) at high speed, the turntable having a smaller diameter than the substrate. Coaxial with the turntable (6), a centering ring (10) having a frustoconical inside surface can be raised vertically between a lower and upper position. The latter has on its upper side a greater diameter and on its lower side a smaller diameter than the substrate (7). In its lower position the centering ring (10) is at a distance from a substrate (7) lying on the turntable (6), but in its upper position its inside surface supports the substrate (7) at an axial distance above turntable (6).
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申请公布号 |
US5777979(A) |
申请公布日期 |
1998.07.07 |
申请号 |
US19960753796 |
申请日期 |
1996.11.27 |
申请人 |
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG |
发明人 |
HENSEL, BERND;HOFMANN, FRIEDRICH;KOOP, HERMANN;FEICK, EBERHARD;RICHTER, FRANZ |
分类号 |
G11B17/022;G11B7/26;(IPC1-7):G11B23/00;G11B25/04 |
主分类号 |
G11B17/022 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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