| 摘要 |
<p>To improve the quality of a product subjected to a surface treatment, such as a film-coating treatment, a heater (5) in this apparatus heats and turns into plasma a gas (6) to be ejected onto the surface of an object (15) to be treated, the gas being thus put in a highly reactive condition (excited condition or active condition). The heated and plasma gas is adiabatically expanded by a rubber nozzle (1) so that it has a velocity of flow higher than a sound velocity. The gas (7) the velocity of flow of which is made higher than a sound velocity is ejected toward the surface of the object (15) to be treated. The gas (7) which has thus been heated, turned into plasma and put in a highly reactive condition reaches the object (15) at a supersonic speed in a short period of time. This apparatus is further provided with a nozzle outlet pressure regulating chamber (18) enclosing the outlet of the supersonic nozzle (1) and the object (15), and a chamber (19) enclosing an induction coil (5) and regulating the pressure in the vicinity of the induction coil (5), these chambers (18, 19) being separated. <IMAGE></p> |
