发明名称 BLADE DISPLACEMENT DETECTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To obtain a displacement of a blade due to cutting abrasion by a method wherein light rays emitted from a light emitting section is shielded by the blade interposed between the light emitting section and a photodetecting section, and the silhouette of the blade against the light emitting section is picked up by an image sensor, and the picture image picked up by the sensor is picture-processed. SOLUTION: A blade position detecting means 20 is equipped with a light emitting section 13a and a photodetecting section 14a, and an image sensing means 21a such as a CCD is connected to the photodetecting section 14a through the intermediary of an optical fiber or the like. When the blade 6 intrudes into a light space to incompletely shield light rays emitted from the light emitting section 13a, the silhouette of the blade 6 is picked up by the image sensing means 21a. An apex detecting means 24 expresses the outline of the blade 6 in terms of X-Y coordinates, samples the Z coordinates values, and finds the minimum Z coordinates value of the outline of the blade 6, and the minimum z coordinates value is defined as the position of the apex or the tip of the blade 6. A blade displacement calculating means 6 is electrically connected to the apex detecting means 24.</p>
申请公布号 JPH10177973(A) 申请公布日期 1998.06.30
申请号 JP19960336703 申请日期 1996.12.17
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 B28D5/02;H01L21/301;(IPC1-7):H01L21/301 主分类号 B28D5/02
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