| 摘要 |
PROBLEM TO BE SOLVED: To obtain a wire bonder having high degree of freedom in design and excellent in handling performance in which clamp load can be controlled easily without requiring a high voltage. SOLUTION: Arm parts 1a, 1b are opened/closed by means of a supermagnetostrictive actuator 6 comprising a supermagnetostrictive element 9 and a drive coil 11. Magnetostrictive amount of the supermagnetostrictive actuator 6 is taken out in the form of an electric signal by means of a sensor coil 13 wound around the supermagnetostrictive element 9. In addition to a wire clamp mechanism of aforementioned structure, the wire bonder further comprises a force detecting section 14 for detecting a clamp load based on the output signal from the sensor coil 13, and a drive current control section 12 for controlling the drive current variably to apply a set clamp load by comparing the output from the force detecting section 14 with the set clamp load. |
