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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH10178003(A)
申请公布日期
1998.06.30
申请号
JP19960336721
申请日期
1996.12.17
申请人
KOKUSAI ELECTRIC CO LTD
发明人
TOYODA KAZUYUKI;MAKIGUCHI KAZUMASA;SATO TAKAYUKI;YASHIMA SHINJI;SATO TAKEO;NABESHIMA KEIKO;YOKAWA TAKASHI
分类号
C23C14/50;H01L21/203;H01L21/205;H01L21/302;H01L21/304;H01L21/3065;H01L21/31;(IPC1-7):H01L21/31;H01L21/306
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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