APPARATUS FOR MANUFACTURING SEMICONDUCTOR,申请号JP19960331956-传众专利搜索

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发明名称	APPARATUS FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号	JPH10172893(A)	申请公布日期	1998.06.26
申请号	JP19960331956	申请日期	1996.12.12
申请人	SONY CORP	发明人	KITAGAWA TETSUYA
分类号	G03F7/16;B05C11/08;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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