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发明名称
PATTERN DIVISION PROCESSING METHOD IN ELECTRON BEAM DRAWING DEVICE
摘要
申请公布号
JPH10172885(A)
申请公布日期
1998.06.26
申请号
JP19960330669
申请日期
1996.12.11
申请人
JEOL LTD
发明人
WAKIMOTO OSAMU
分类号
G21K5/04;G03F7/20;H01J37/305;H01L21/027;(IPC1-7):H01L21/027
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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