发明名称 Pressure sensitive adhesive sheet for dicing objects, e.g. semiconductor wafers
摘要 Producing a chip involves attaching an object (5) on a sheet (10) that has at least one layer of shrinkable film (2) and a pressure sensitive adhesive layer (1). The object is diced into chips, and the film is shrunk to reduce the contact area between the chips and the adhesive.
申请公布号 DE19756801(A1) 申请公布日期 1998.06.25
申请号 DE19971056801 申请日期 1997.12.19
申请人 LINTEC CORP., TOKIO/TOKYO, JP 发明人 NOGUCHI, HAYATO, URAWA, SAITAMA, JP;MINEURA, YOSHIHISA, TOKIO/TOKYO, JP;NUMAZAWA, HIDEKI, URAWA, SAITAMA, JP;EBE, KAZUYOSHI, SAITAMA, JP
分类号 B32B27/30;B32B29/00;C09J7/02;H01L21/58;H01L21/68;(IPC1-7):H01L21/68;H01L21/78;C09J7/00;B32B7/10 主分类号 B32B27/30
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