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发明名称
Interconnect fabrication
摘要
申请公布号
GB2320613(A)
申请公布日期
1998.06.24
申请号
GB19970025029
申请日期
1997.11.26
申请人
* HYUNDAI ELECTRONICS INDUSTRIES CO., LTD.
发明人
SEOUNG WOOK * LEE;YEO SONG * SEOL;CHANG JU * CHOI
分类号
H01L23/52;H01L21/302;H01L21/3065;H01L21/3205;H01L21/768;(IPC1-7):H01L21/321
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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