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发明名称
DEVICE FOR FORMING DEPOSITED FILM AND METHOD FOR FORMING DEPOSITED FILM
摘要
申请公布号
JPH10168576(A)
申请公布日期
1998.06.23
申请号
JP19960352137
申请日期
1996.12.12
申请人
CANON INC
发明人
AKIYAMA KAZUYOSHI
分类号
G03G5/08;C23C16/24;C23C16/44;C23C16/455;C23C16/50;G03G5/082;H01J37/32;H01L21/205;(IPC1-7):C23C16/50
主分类号
G03G5/08
代理机构
代理人
主权项
地址
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