发明名称 USE OF ELECTRONIC ATTENUATOR FOR MEMS OSCILLATOR OVERDRIVE PROTECTION
摘要 An apparatus includes a microelectromechanical system (MEMS) device configured as part of an oscillator. The MEMS device includes a mass suspended from a substrate of the MEMS, a first electrode configured to provide a first signal based on a displacement of the mass, and a second electrode configured to receive a second signal based on the first signal. The apparatus includes an amplifier coupled to the first electrode and a first node. The amplifier is configured to generate an output signal, the output signal being based on the first signal and a first gain. The apparatus includes an attenuator configured to attenuate the output signal based on a second gain and provide as the second signal an attenuated version of the output signal.
申请公布号 US2014176248(A1) 申请公布日期 2014.06.26
申请号 US201213721630 申请日期 2012.12.20
申请人 Silicon Laboratories Inc. 发明人 Caffee Aaron;Seth Manu;Drost Brian
分类号 H03B5/30;B81B7/02 主分类号 H03B5/30
代理机构 代理人
主权项 1. An apparatus comprising: a microelectromechanical system (MEMS) device configured as part of an oscillator comprising: a mass suspended from a substrate of the MEMS;a first electrode configured to provide a first signal based on a displacement of the mass; anda second electrode configured to receive a second signal based on the first signal; an amplifier coupled to the first electrode and a first node, the amplifier configured to generate an output signal, the output signal being based on the first signal and a first gain; and an attenuator configured to attenuate the output signal based on a second gain and provide as the second signal an attenuated version of the output signal.
地址 US