发明名称 |
Metode selektivai nevelama materiala nonemsanai no apstradajamas virsmas ar polarizeta starojuma palidzibu |
摘要 |
An apparatus and method for selectively removing undesired material from the surface of a substrate provides a flow of inert gas over the undesired material substrate surface while irradiating the undesired material with energetic photons. The invention enables removal of undesired material without altering the physical properties of the material underlying or adjacent the removed, undesired material. Removal effectiveness may be enhanced by utilizing polarized energetic photons. Directing a laser beam to the back side of a transparent substrate may enhance the effectiveness of removal. |
申请公布号 |
LV12080(A) |
申请公布日期 |
1998.06.20 |
申请号 |
LV19980000001 |
申请日期 |
1998.01.05 |
申请人 |
CAULDRON LIMITED PARTNERSHIP |
发明人 |
AUDREY C. ENGELSBERG;ANDREW W. JOHNSON;WILLIAM P. PARKER |
分类号 |
B08B7/00;B23K26/00;B23K26/06;B23K26/073;G03F7/20;G03F7/42;H01L21/304;H01L21/3205;H01L21/768 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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