Method of processing a polysilicon film,申请号EP19970201298-传众专利搜索

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发明名称	Method of processing a polysilicon film
摘要
申请公布号	EP0793265(A3)	申请公布日期	1998.06.17
申请号	EP19970201298	申请日期	1993.03.09
申请人	NEC CORPORATION	发明人	SHIMIZU, JUNZOH
分类号	H01L21/302;H01L21/285;H01L21/3213;H01L21/331;H01L29/73;H01L29/732;(IPC1-7):H01L21/28;H01L21/321	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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