发明名称 |
Magnetischer Aufzeichnungsträger |
摘要 |
A magnetic recording medium comprising a nonmagnetic base, an SiOx (x = 1.2 SIMILAR 1.95) undercoat, an under-layer ferromagnetic metal film consisting of a Co-Ni alloy, an SiOx (x = 1.2 SIMILAR 1.95) intermediate layer, an upper-layer ferromagnetic metal protective film consisting of a Co-Ni alloy, a diamond-like carbon protective film, and a lubricant layer, formed in the order of mention, the angles of vapor deposition as measured from lines normal to the upper- and under-layer ferromagnetic metal films being all decreasing toward the upper surfaces. The magnetic recording medium is made by forming an SiOx (x = 1.2 SIMILAR 1.95) undercoat by vapor deposition on a flexible nonmagnetic base being fed, forming an under-layer ferromagnetic metal film by vapor deposition of a Co-Ni alloy at a large deposition angle on the supply side and at a small deposition angle on the take up side, rewinding the semi-finished product thus obtained, repeating the foregoing process steps, forming a diamond-like carbon protective film, and further forming a lubricant layer over the diamond-like carbon protective film, all within a vacuum chamber. <IMAGE> |
申请公布号 |
DE69317038(T2) |
申请公布日期 |
1998.06.10 |
申请号 |
DE1993617038T |
申请日期 |
1993.11.30 |
申请人 |
TDK CORP., TOKIO/TOKYO, JP |
发明人 |
MIYAZAKI, SHINJI, C/O TDK CORPORATION, TOKYO, JP;TAKAI, MITSURU, C/O TDK CORPORATION, TOKYO, JP;KOBAYASHI, KOJI, C/O TDK CORPORATION, TOKYO, JP |
分类号 |
C23C14/06;G11B5/64;G11B5/66;G11B5/73;G11B5/738;G11B5/84;G11B5/85;H01F10/16;H01F41/20;(IPC1-7):G11B5/716;G11B5/72;G11B5/718;G11B5/71 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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