发明名称 Magnetischer Aufzeichnungsträger
摘要 A magnetic recording medium comprising a nonmagnetic base, an SiOx (x = 1.2 SIMILAR 1.95) undercoat, an under-layer ferromagnetic metal film consisting of a Co-Ni alloy, an SiOx (x = 1.2 SIMILAR 1.95) intermediate layer, an upper-layer ferromagnetic metal protective film consisting of a Co-Ni alloy, a diamond-like carbon protective film, and a lubricant layer, formed in the order of mention, the angles of vapor deposition as measured from lines normal to the upper- and under-layer ferromagnetic metal films being all decreasing toward the upper surfaces. The magnetic recording medium is made by forming an SiOx (x = 1.2 SIMILAR 1.95) undercoat by vapor deposition on a flexible nonmagnetic base being fed, forming an under-layer ferromagnetic metal film by vapor deposition of a Co-Ni alloy at a large deposition angle on the supply side and at a small deposition angle on the take up side, rewinding the semi-finished product thus obtained, repeating the foregoing process steps, forming a diamond-like carbon protective film, and further forming a lubricant layer over the diamond-like carbon protective film, all within a vacuum chamber. <IMAGE>
申请公布号 DE69317038(T2) 申请公布日期 1998.06.10
申请号 DE1993617038T 申请日期 1993.11.30
申请人 TDK CORP., TOKIO/TOKYO, JP 发明人 MIYAZAKI, SHINJI, C/O TDK CORPORATION, TOKYO, JP;TAKAI, MITSURU, C/O TDK CORPORATION, TOKYO, JP;KOBAYASHI, KOJI, C/O TDK CORPORATION, TOKYO, JP
分类号 C23C14/06;G11B5/64;G11B5/66;G11B5/73;G11B5/738;G11B5/84;G11B5/85;H01F10/16;H01F41/20;(IPC1-7):G11B5/716;G11B5/72;G11B5/718;G11B5/71 主分类号 C23C14/06
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