发明名称 Gripper for disk-shaped articles
摘要 PCT No. PCT/AT94/00153 Sec. 371 Date Apr. 19, 1996 Sec. 102(e) Date Apr. 19, 1996 PCT Filed Oct. 20, 1994 PCT Pub. No. WO95/11518 PCT Pub. Date Apr. 27, 1995A gripper assembly with gripper fingers (2) which are mounted so that they can be guided and moved radially inward and outward relative to the main body of the assembly. The gripper fingers (2) are biased radially inward by springs. Fitted in the main body (1) is a finger-opening device (20) with a conical body (21) which moves all of the fingers (2) radially outward together against the action of the springs. If the finger-opening device (20) is then retracted, at least some of the fingers (2) come to rest against the edge of the disc-shaped article. If the device (20) is retracted further, the remaining fingers also come to rest, under the action of their associated springs, against the edge of the disc-shaped article. The conical body (21) in the finger-opening device (20) acts on the fingers (2) via guiding elements (12) fitted inside the main body and connected to the fingers (2) by guiding rods (8).
申请公布号 US5762391(A) 申请公布日期 1998.06.09
申请号 US19960632457 申请日期 1996.04.19
申请人 SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG GESELLSCHAFT M.B.H. 发明人 SUMNITSCH, FRANZ
分类号 H01L21/677;B25J15/02;B25J15/08;B65G49/07;H01L21/00;H01L21/68;H01L21/687;(IPC1-7):B25J15/10 主分类号 H01L21/677
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