PLASMA PARAMETER MEASUREMENT DEVICE,申请号JP19960327963-传众专利搜索

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发明名称	PLASMA PARAMETER MEASUREMENT DEVICE
摘要
申请公布号	JPH10154600(A)	申请公布日期	1998.06.09
申请号	JP19960327963	申请日期	1996.11.21
申请人	ADTEC:KK	发明人	SHINDO HARUO
分类号	H05H1/46;C23C16/50;C23C16/515;C23F4/00;H01L21/302;H01L21/3065;H05H1/00;(IPC1-7):H05H1/46;H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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