发明名称 PRODUCTION OF FINE PATTERN, COLOR FILTER AND LIGHT SHIELDING PATTERN FILTER USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a fine pattern by which the fine pattern can be completely peeled and transferred on a substrate medium with an excellent reproducibility, a master substrate can be repeatedly used and the fine pattern of high precision and high density can be simply formed with excellent mass-productivity and a color filter and a light shielding pattern filter using the fine pattern. SOLUTION: The manufacturing method of the fine pattern is provided with a process for manufacturing the master substrate 1 having a pattern electrode layer of a prescribed shape, a process for forming a peeling layer 7 composed of a thin film with conductivity and water repellency on the master substrate 1, a process for forming the fine pattern made of an electrodeposited resin on the peeling layer 7, a process for impregnating the electrodeposited resin with moisture and a process for peeling and transferring the fine pattern on the adhering layer of the medium substrate from the master substrate. Further, the color filter and the light shielding pattern filter are manufactured according to the manufacturing method of the fine pattern.
申请公布号 JPH10152797(A) 申请公布日期 1998.06.09
申请号 JP19960310349 申请日期 1996.11.21
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAKAJIMA KOJI;IHARA KEITA;MATSUMOTO HIDETOSHI;OMORI TAKAHIRO
分类号 G02B5/20;C23F4/00;C25D13/00;G02F1/1335 主分类号 G02B5/20
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