发明名称 Fault tolerant antireflective coatings
摘要 A narrow-band antireflective coating is comprised of a multilayer dielectric film formed on a dielectric substrate. The antireflective coating is initially formed so that its outer layer has a thickness greater than the thickness required for antireflection. The reflectivity is monitored while outer layer is reduced in thickness to reduce the thickness of the outer layer to reduce the reflectivity.
申请公布号 US5764416(A) 申请公布日期 1998.06.09
申请号 US19960584334 申请日期 1996.01.11
申请人 LITTON SYSTEMS, INC. 发明人 RAHN, JOHN P.
分类号 G02B1/11;(IPC1-7):G02B1/10;B05D5/06 主分类号 G02B1/11
代理机构 代理人
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