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发明名称
Verfahren zur Bestimmung der Scharfeinstellung einer photolithographischen Belichtungsvorrichtung
摘要
申请公布号
DE69318220(D1)
申请公布日期
1998.06.04
申请号
DE19936018220
申请日期
1993.07.06
申请人
FRANCE TELECOM, PARIS, FR
发明人
MINGHETTI, BLANDINE, F-38410 VAULNAVEYS LE HAUT, FR;TISSIER, ANNIE, F-38330 SAINT ISMIER, FR;PROLA, ALAIN, F-38100 GRENOBLE, FR;SCHWARTZ, ERIC, F-38180 SEYSSINS, FR
分类号
G03F7/20;G03F7/207;G03F9/00;H01L21/027;(IPC1-7):G03F7/207
主分类号
G03F7/20
代理机构
代理人
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地址
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