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发明名称
MIKROMECHANISCHER AKTOR
摘要
申请公布号
DE59502013(D1)
申请公布日期
1998.05.28
申请号
DE19955002013
申请日期
1995.09.20
申请人
FORSCHUNGSZENTRUM KARLSRUHE GMBH, 76133 KARLSRUHE, DE
发明人
FEIT, KLAUS, D-76676 GRABEN-NEUDORF, DE;HECKELE, MATHIAS, D-76351 LINKENHEIM, DE;RUTHER, PATRICK, D-76139 KARLSRUHE, DE;WEINDEL, KLAUS, D-76694 FORST, DE
分类号
F15B15/00;F15C5/00;(IPC1-7):F15C5/00
主分类号
F15B15/00
代理机构
代理人
主权项
地址
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