Method for forming zener diode with high time stability and low noise

摘要

Zener diode with high stability in time and low noise for integrated circuits and provided in an epitaxial pocket insulated from the rest of a type N epitaxial layer grown on a substrate of type P semiconductor material. In said pocket are included a type N+ cathode region and a type P anode region enclosing it. The cathode region has a peripheral part surrounding a central part extending in the anode region less deeply than the peripheral part.