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发明名称
摘要
申请公布号
JP2757864(B2)
申请公布日期
1998.05.25
申请号
JP19860156834
申请日期
1986.07.03
申请人
ROOMU KK
发明人
HIGUCHI YASUYUKI;OKADA TOORU
分类号
H01L27/04;H01L21/331;H01L21/822;H01L21/8222;H01L27/06;H01L29/72;H01L29/73;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L27/04
代理机构
代理人
主权项
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