发明名称 RADIATION SENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide the composition capable of suppressing the occurrence of scum, improved in developing property, high in sensitivity and excellent in heat resistance and residual film ratio by incorporating a specific alkali soluble resin and a specific 1,2-quinone diazide compound into the composition. SOLUTION: This radiation resin composition containing the alkali soluble resin having weight average molecular weight of 2000-20000 expressed in terms of polystyrene and the 1,2-quinone diazide compound expressed by formula is used. In the formula, P represents integers of 0 or 1, D represents hydroxide group or an organic group having 1,2-quinone diazide group and a part or the whole of D is the organic group having 1,2-quinone diazide group. Various blending agents such as a sensitizer, a surfactant, a dissolution accelerating agent can be added in the composition. A dye or a pigment can be added to the composition in order to visualize a latent image in a part irradiated with radiation and reduce the effect of halation at the time of irradiation of radiant ray, and an adhesive assistant can be added in order to improve adhesion.
申请公布号 JPH10133369(A) 申请公布日期 1998.05.22
申请号 JP19970347007 申请日期 1997.12.01
申请人 JSR CORP 发明人 KAJITA TORU;MIURA TAKAO;ISAMOTO YOSHITSUGU;OKUDA CHOZO
分类号 G03F7/022;G03F7/004;G03F7/023;G03F7/039;H01L21/027;(IPC1-7):G03F7/022 主分类号 G03F7/022
代理机构 代理人
主权项
地址