| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately position a vertical boat in horizontal and vertical directions. SOLUTION: A boat position adjusting apparatus comprises a first movable stage mounting in place a vertical boat 2 having grooves 3a, 4a, 5a, 6a, for holding wafers 11 sideways, first means 10 for verifying the right and left positions of the board side face, and second means 9 for verifying the front and back positions of the front face of the boat 2. The first verifying means is disposed at a regular position of the front face having a wafer insert hole of the boat, and the second verifying means is disposed at the side face of the boat 2. The boat 2 is mounted on the stage 1 which is moved in the longitudinal direction of the boat 2 and rotating direction of a horizontal plane, to verify that the front of the boat 2 is at a correct position using the second verifying means 9, and moved in the transverse direction of the boat 2 to verify the side face of the boat is at a correct position by the first verifying means 10.</p> |
