| 摘要 |
PROBLEM TO BE SOLVED: To improve the workability when a pre-ionized electrode is replaced. SOLUTION: Out of a plurality of pairs of pre-ionized electrodes 3a and 3b, a plurality of electrode pins 39 are provided on one side of the discharge surface side, and a long and narrow electrode, facing to at least two or more electrode pins 39, is provided on the other side. At least, the electrodes on either side consists of a plurality of electrode pins 39 which are integrally formed and attached to the above-mentioned coupling member, or the above- mentioned electrodes consists of a long and narrow insulating coupling member and a plurality of electrode pins 39 which are integrally formed and attached in the state in which the end part of the opposite side of the discharge surface passing through the above-mentioned coupling member and protruded to outside, and they are detachably attached to a laser chamber in an integrally formed state. At least, one or more pairs of pre-ionized electrodes 3a and 3b may be formed into a pre-ionized electrode block 30 on which a pair of opposing electrodes are detachably attached to an insulating member. |
