METHOD AND APPARATUS FOR DETECTING PINHOLE

摘要

PROBLEM TO BE SOLVED: To correctly specify the position of a pinhole. SOLUTION: A member to be tested is loaded on an electrode plate 4 fixed onto an upper plate 2a of a base 2 of an apparatus 1. A detecting unit 7 is movable in X-axis and Y-axis directions. An electrode probe 12 for impressing a high voltage to the electrode plate 4 is pressed in a Z-axis direction and brought in touch with the member to be tested. A size of a pressing face of the electrode probe 12 brought in touch with the member to be tested is formed smaller than a wavelength of undulations of the member to be tested. The detecting unit 7 is also provided with a means for measuring a film thickness of the member to be tested.