CONTROLLER OF SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a controller of a semiconductor manufacturing device by which indices indicated by SEMI E-10 are calculated automatically from measured values. SOLUTION: A device data collecting unit 11 of a controller 1 monitors the states of a semiconductor manufacturing device 3 which are received from the device 3 through a device control unit 2, and times for which the device 3 stays in the respective states are measured. If the occurrences of failures or the occurrences of troubles in the device are received, the number of occurrences is counted and stored in a device data/input data storage memory 19. A picture control unit 14 calculates indices indicated by SEMI E-10, and a picture display/input unit 15 displays the incices on a screen 4.