| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the counter force of the driving force of a wafer stage, etc., from being propagated to a surface plate. SOLUTION: The stator 42 of a Y linear motor 40 which transfers a Y-stage 20 on a surface plate 10 in a Y-axis direction is supported by fixing members 42c supported by a floor. The mover 41 of the Y linear motor 40 supports the stator 52 of an X linear motor 50 which transfers an X-stage 30 on the Y-stage 20 in an X-axis direction. The Y-stage 20 is made to follow the movement of the mover 41 of the Y linear motor 40 by a driving force transmission linear motor 24.</p> |
