发明名称 Turning-over machine and polishing apparatus
摘要 The present invention provides a dry/wet work turning-over machine (10) which can be used with both a dry hand and a wet hand and in which, even when the dry hand having a vacuum suction mechanism is inserted into a water-proof cover (21) surrounding a work turning-over device (11), liquid is not adhered to the hand. In the dry/wet work turning-over machine (10), the work turning-over device (11) is surrounded by the water-proof cover (21). An opening (23) is formed in the water-proof cover (21) at an upper surface of a front side thereof and a front part of an upper surface thereof. A screen (25) for closing the opening (23) is attached to the opening (23). The screen (25) is rotated in a downward direction by a rotation driving mechanism (29). <IMAGE> <IMAGE>
申请公布号 EP0841102(A1) 申请公布日期 1998.05.13
申请号 EP19970117490 申请日期 1997.10.09
申请人 EBARA CORPORATION 发明人 TOGAWA, TETSUJI;YAMAGUCHI, KUNIAKI
分类号 B08B17/00;H01L21/00 主分类号 B08B17/00
代理机构 代理人
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