| 摘要 |
PROBLEM TO BE SOLVED: To enable to grow a single crystal in good precision when pulling the single crystal grown, e.g. by the Czpchralski method, to have a heavy weight by transferring the means for pulling the crystal. SOLUTION: This method for pulling a single crystal is to pull the grown single crystal by a hanging tool at first, then by a holding tool in the halfway through pulling. In this case, while a relative velocity Va of the hanging tool against the holding tool is reduced from a starting point (a) for starting to shift a means for pulling up the crystal, lifting of the holding tool starts with a velocity Vb, the total velocity Vt=Vb+Va is adjusted to a predetermined velocity V in a constant value to a position (c) where a lord of the hanging tool is shifter to the holding tool, then, Vt is adjusted to Vt<V from the point (c) where the lord is shifted to the holder and the crystal is pulled up in a middle region A between a pattern (1) and a pattern (2). |
