MICROMECHANICAL VIBRATORY GYROSCOPE

摘要

FIELD: gyroscopic equipment, systems controlling mobile objects, indicators of object movements. SUBSTANCE: inertial mass of micromechanical vibratory gyroscope is made in the form of individual elements supported as cantilever in support with the help of restoring members and placed in symmetry relative to base plane. Elements of inertial mass are displaced with regard to center of suspension axis of support formed by two uniaxial torsion bars along this axis. Elements of gyroscope are made from monocrystalline silicon by etching method and device exciting vibrations of inertial mass is fabricated in the form of layers of piezoceramic deposited on elements of inertial mass and restoring members. EFFECT: expanded functional capabilities, provision for measurement of angular velocity relative to orthogonal axes. 3 cl, 4 dwgi