METHOD AND APPARATUS FOR THE PRODUCTION OF THIN FILMS

摘要

Method and apparatus (2) for forming thin films by the application of a film forming liquid to a substrate (124) at rest or rotating a speed up to 500 rpm and then rotating the film forming liquid on the substrate (124) at a speed and for a time sufficient to form the thin film. Such films can be used for analysis by spectrophotometric methods. Apparatus for forming such thin films is also disclosed.