申请人 |
EBARA CORP., TOKIO/TOKYO, JP |
发明人 |
YAMAMOTO, MASAKAZU, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;MIYAKE, YOSHIO, C/O EBARA RESEARCH CO., LTD, FUJISAWA-SHI, KANAGAWA-KEN, JP;ISEMOTO, KOJI, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;UWAI, KEITA, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;MIYAZAKI, YOSHIAKI, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;KOBAYASHI, MAKOTO, C/O EBARA RESEARCH CO., LTD, FUJISAWA-SHI, KANAGAWA-KEN, JP |