DETECTION OF DISAPPEARANCE OF SOLID LAYER, SINGLE CRYSTAL GROWTH METHOD USING THE SAME AND DEVICE FOR THE SAME GROWTH METIIOD,申请号JP19960267612-传众专利搜索

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发明名称	DETECTION OF DISAPPEARANCE OF SOLID LAYER, SINGLE CRYSTAL GROWTH METHOD USING THE SAME AND DEVICE FOR THE SAME GROWTH METIIOD
摘要
申请公布号	JPH10114595(A)	申请公布日期	1998.05.06
申请号	JP19960267612	申请日期	1996.10.08
申请人	SUMITOMO SITIX CORP	发明人	KAWANISHI SHOROKU
分类号	G01N21/84;C30B15/02;C30B15/20;C30B29/06;H01L21/208;(IPC1-7):C30B15/20	主分类号	G01N21/84
代理机构		代理人
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地址

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