| 摘要 |
PROBLEM TO BE SOLVED: To supply a sufficient joint energy to a ball and a bonding object by exciting a bonding tool axially so attached that on the tip of the horn that axis-centers are at almost right angle to each other. SOLUTION: The vibration in axis-center direction (arrow U1) applied to a horn 1 from a vibrator 3, in other word, longitudinal vibration is, based on the configuration wherein a capillary (bonding tool) 7 is attached with its axial orthogonal to the horn 1, converted into a deflection vibration in scrub direction of the capillary 7. With the output of a transmitter 23, or an oscillation frequency, set, for example, to maximum 1.5W, 30-60KHz, the horn 1 performs deflection vibration at this frequency. The deflection vibration is transferred as that in axial direction of the capillary 7 to the capillary 7, thus the capillary 7 is vibrated. With this vibration, the disturbance in the vibration in scrub direction caused by collapse of mass balance around the axis of the horn 1 is suppressed, so that a joint energy is sufficiently transferred. |
