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发明名称
SLICE BASE RELEASING DEVICE
摘要
申请公布号
JPH10116803(A)
申请公布日期
1998.05.06
申请号
JP19960269841
申请日期
1996.10.11
申请人
TOKYO SEIMITSU CO LTD
发明人
MINAMI SATORU;NAKAURA KENICHI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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