Cobalt platinum magnetic film and method of fabrication thereof

摘要

A cobalt-platinum (CoPt) magnetic film is deposited onto a chromium (Cr) or tungsten (W) underlayer on a substrate, or is deposited directly onto the substrate. The deposited film has an appreciable component of its C-axis which is parallel to the [00.2] direction, lying in the plane of the film. The resultant magnetic films exhibit coercivities from 2100-3000 oersteds. The method of the invention comprises sputtering the underlayer onto a substrate maintained approximately at room temperature in an atmosphere of hydrogen and an inert gas such as Ar or Xe.