| 发明名称 |
Method of forming films comprising TiN and Al |
| 摘要 |
<p>A process for producing conformal and stable TiN + Al films, which provides flexibility in selecting the chemical composition and layering. In this new process, porous TiCN is first deposited, and then Al is incorporated by exposing the porous film to CVD aluminum conditions at low temperatures. <IMAGE> <IMAGE> <IMAGE></p> |
| 申请公布号 |
EP0839927(A2) |
申请公布日期 |
1998.05.06 |
| 申请号 |
EP19970308768 |
申请日期 |
1997.10.31 |
| 申请人 |
TEXAS INSTRUMENTS INC. |
发明人 |
LU ,JIONG - PING;HSU, WEI-YUNG;HONG , QI-ZHONG |
| 分类号 |
C23C16/56;C23C16/34;H01L21/285;H01L21/768;(IPC1-7):C23C16/34;C04B41/51 |
主分类号 |
C23C16/56 |
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