DRY-ETCHING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent occurrence of abnormality in etching shape, by coating a clamp ring of alumina ceramics with a polyimide tape, so that alumina is not sputtered on an oxide film. SOLUTION: A semiconductor wafer 3 is held on a lower part electrode table with a clamp ring 4 contacting so its periphery part in such manner as pressed down from above. Relating to the clam ring 4, a main body 4A of alumina ceramics is coated with a polyimide tape (Kapton tape) 4B which is an insulating resin. By coating conventional clamp ring of alumina ceramic with a polyimide tape of components C, H, and O wherein no toxic material such as Al is present when an LSI element is manufactured, an alumina is hard to be spattered on an oxide film, which is a conventional problem. Thus, occurrence of abnormality in etching shape is prevented.