发明名称 |
COMPOSANT OPTIQUE DE MODULATION, POLARIMETRE ET ELLIPSOMETRE DE MUELLER COMPRENANT UN TEL COMPOSANT OPTIQUE, PROCEDE DE CALIBRAGE DE CET ELLIPSOMETRE ET PROCEDE DE MESURE ELLIPSOMETRIQUE |
摘要 |
The invention concerns an optical component of polarizing modulation, a polarimeter and a Mueller ellipsometer comprising this optical component. The optical component modulates an incident light beam (10) linearly polarized and sends back a modulated beam (11). It comprises a coupled phase modulator (6B) modulating twice successively the incident beam, the two modulations being at the same frequency omega /2 pi and being coupled by a system (61) modifying the state of polarization of the light between the two modulations. The ellipsometer comprises means for sensing a measuring beam sent back by a sample, which receives the modulated beam, and a processing unit. The sensing means include a polarimeter generating n measured quantities representing the states of polarization of the beam and the processing unit generates by Fourier transform m values for each of these quantities, with n x m >/= 16 and m >/= 4, for simultaneously acceding to the sixteen coefficients of the Mueller matrix of the sample.
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申请公布号 |
FR2755254(A1) |
申请公布日期 |
1998.04.30 |
申请号 |
FR19960013081 |
申请日期 |
1996.10.25 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS |
发明人 |
DREVILLON BERNARD;COMPAIN ERIC |
分类号 |
G01J4/04;G01J4/00;G01N21/21;G02F1/03;(IPC1-7):G02F1/01 |
主分类号 |
G01J4/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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