发明名称 STRUTTURA COMPOSITA CON SUBSTRATO DI CRESCITA CHE PRESENTA UNA PLURALITA' DI MICROCOMPONENTI ELETTRONICI ED UNO STRATO DI DIAMANTE
摘要 A method for producing a composite structure for microelectronic devices includes producing several microelectronic devices by means of a deposition method, pre-seeding a surface with growth seeds for a diamond and depositing the diamond layer from a gas phase. The diamond layer is provided with thin spots between the devices. According to the invention, the devices are laid down initially on a growth substrate directly and/or with the use of the material of the growth substrate. Following the deposition of the devices, the latter are seeded on their free surfaces for the diamond layer. The diamond layer is located on the seeded free surfaces of the devices.
申请公布号 ITRM980279(D0) 申请公布日期 1998.04.29
申请号 IT1998RM00279 申请日期 1998.04.29
申请人 DAIMLER-BENZ AKTIENGESELLSCHAFT 发明人 KONRAD BRIGITTE;GOTTLER HERBERT
分类号 C30B29/04;H01L21/20;H01L21/205;H01L21/31;H01L21/314;H01L27/00 主分类号 C30B29/04
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