发明名称 Method of manufacturing a magnetoresistive magnetic sensor and transducer obtained
摘要 <p>The process commences with an orientated silica substratum (20) which is engraved using sodium hydroxide. The silica substratum forms cavities (32,34) with sides at 55 degrees to the horizontal under engraving and an insulating layer is then formed by thermal oxidation. A magnetic layer is then deposited into the cavities (32,34) electrolytically and more than fills them. The excess is removed by polishing to expose again the central insulating layer. Magnetic layers (36,38) are deposited on the flux guides (32,34) and finally the magnetoresistive element (40) is added to overlap the magnetic layers (36,38).</p>
申请公布号 EP0838690(A1) 申请公布日期 1998.04.29
申请号 EP19970402478 申请日期 1997.10.20
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 FEDELI, JEAN-MARC
分类号 G01R33/09;H01L43/12;(IPC1-7):G01R33/09 主分类号 G01R33/09
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