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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10112475(A)
申请公布日期
1998.04.28
申请号
JP19960266836
申请日期
1996.10.08
申请人
SONY CORP
发明人
YASUDA MASAYUKI
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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